Aluminum Nitride ceramic substrates and Silicon Nitride ceramic substrates are core thermal dissipation/packaging materials for third-generation semiconductors and high-power electronics. Their key advantages include extremely high thermal conductivity, thermal expansion matching that of silicon, excellent insulation, and superior mechanical properties.
Heat dissipation substrates, Substrates for LED packaging, Substrates for semiconductors, Thin-film circuit substrates, Substrates for power resistors
| Property Sort | Characteristic | Unit | Property Index | |||
| AlN170 | AlN200 | AlN230 | ||||
| Basic Property | Color | — | Gray | Gray | Beige | |
| Water absorption | % | 0 | 0 | 0 | ||
| Volume density | g/cm³ | ≥3.30 | ≥3.30 | ≥3.26 | ||
| Surface roughness | um | Lapped 0.2~0.6 | Lapped 0.2~0.6 | Lapped 0.2~0.6 | ||
| Polished<0.05 | Polished<0.05 | Polished<0.05 | ||||
| Camber | length% | ≤3% | ≤3% | ≤3% | ||
| Thermal Property | Thermal conductivity | 25℃ | W/m.k | ≥170 | ≥200 | ≥230 |
| 300℃ | ≥120 | ≥130 | ≥145 | |||
| Coefficient of thermal expansion | 40℃~400℃ | ×10⁻⁶/k | 4.6 | 4.6 | 4.5 | |
| 40℃~800℃ | 5.2 | 5.2 | 5.2 | |||
| Specific Heat（25°C） | J/(kg*K) | 720 | 720 | 720 | ||
| Poisson's Ratio | — | 0.24 | 0.24 | 0.24 | ||
| Mechanical Property | Bending strength（Three points） | Mpa | ≥450 | ≥400 | ≥350 | |
| Modulus strength | Gpa | 320 | 310 | 310 | ||
| Moh's hardness | — | 8 | 8 | 8 | ||
| Vickers hardness | Gpa | 11 | 11 | 11 | ||
| Fracture Toughness(IF test) | Mpa·m¹ᐟ² | 3 | 2.6 | 2.4 | ||
| Electrical Property | Dielectric strength | KV/mm | ≥25 | ≥26 | ≥27 | |
| Volume resistivity（25℃） | Ω·cm | ≥10¹⁴ | ≥10¹⁴ | ≥10¹³ | ||
| Dielectric constant | 1MHz | 8.5 | 8.5 | 8.5 | ||
| Dielectric loss | 1MHz，×10⁻³ | 0.3 | 0.3 | 0.3 | ||
| Dimension(mm) | Thickness(mm) | Others |
| 25*20 | 0.127/0.15/0.2/0.25/0.3/0.35/0.38/0.5/0.635/0.76/1.0/1.5/2.0/2.5/3.0 |
Tolerance(Dimension)：±1%，NLT：±0.05mm
Tolerance(Thickness)：±10%，NLT:±0.01mm Lapping(2 sides)：Ra0.2~0.7um Polished：Ra0.02~0.05um Through hole：φ0.15mm~Tolerance：+0.05mm.NLT：+0.02mm Laser drilling spot diameter：0.06~0.1mm Laser drilling spot length：0.05~0.08，width:0.015~0.03Line depth：30%~70%，Tolerance：3%~10% Camber：≤3%，NLT：0.5% Flatness：20~70um |
| 24*38 | ||
| 50.8*50.8 | ||
| 76.2*76.2 | ||
| 101.6*101.6 | ||
| 114.3*114.3 | ||
| 120*120 | 0.25/0.3/0.38/0.5/0.635/0.76/1.0/1.5/2.0/2.5/3.0 | |
| 127*127 | ||
| 160*160 | ||
| 139.7*190.5 | ||
| φ16/φ20/φ26/φ30 | 0.635/1.0/1.5/2.0 | |
| φ35/φ40/φ45/φ50 | ||
| φ55/φ60/φ65/φ70 | ||
| φ100/φ125/φ150/φ200 | 0.38/0.5/0.635/0.76/1.0/1.5/2.0/2.5/3.0 |
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Add: Dongtai High-tech Zone, Dongtai, Yancheng, Jiangsu, China
