As a trusted China-based manufacturer and supplier, Haigude delivers high-performance Alumina Ceramic Electrostatic Chuck, including alumina ceramic electrostatic chucks, engineered for precision industries such as semiconductors, display panels, and optics. Designed for vacuum, plasma, and high-temperature environments, our solutions ensure stable, damage-free clamping of thin workpieces while meeting rigorous customization needs.
High-Purity Alumina Material: Reduces metal contamination, ensuring ultra-clean operation in sensitive processes.
Plasma Compatibility: Excellent durability in halogen and reactive plasma environments.
Integrated Electrode Technology: Metal electrodes pre-embedded inside ceramics via sinter bonding provide stable performance under harsh conditions.
Precision Lamination: Achieves uniform in-plane temperature distribution for consistent process results.
Customizable Design: Dimensions, thickness, and surface roughness can be tailored to specific application requirements.
