Leveraging the stress-free, ultra-clean, and vacuum-compatible characteristics, alumina ceramic chucks are the optimal solution for stable, damage-free, and high-precision clamping of thin workpieces in vacuum/plasma/high-temperature environments across precision manufacturing industries including semiconductors, display panels, and optics. With full-process capabilities from product development and prototyping to mass production, we can rapidly respond to and precisely meet customized customer requirements.
Lamination technology achieves extremely high in-plane temperature uniformity.
Using high-purity alumina reduces metal contamination.
It exhibits excellent durability in plasma environments such as halogen gases.
By pre-embedding metal electrodes inside ceramics and forming them through integrated sinter bonding, we have developed a series of electrostatic chucks and ceramic heaters that can stably adapt to harsh conditions such as plasma environments and electron beam applications. From the development and trial manufacturing stages, we can deliver customized products that meet customer application requirements.
| Parameter | Value |
| Dimensions | Customized on demand |
| Thickness | Customized as required |
| Dielectric Constant | Application-adapted |
| Density | 3.7-3.9 g/cm³ |
| Surface Roughness | Custom per drawing |
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No. 2567, Antai 2nd Road, Xishan District, Wuxi, Jiangsu, China
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Add: No. 2567, Antai 2nd Road, Xishan District, Wuxi, Jiangsu, China
Add: Dongtai High-tech Zone, Dongtai, Yancheng, Jiangsu, China
